One, Two, or Three Axis Laser Interferometer Displacement Measurement System
Installation and Operation Manual

Version 1.31 (6-Aug-24)

Copyright © 1994-2024
Samuel M. Goldwasser
--- All Rights Reserved ---

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Table of Contents


Introduction

This manual provides installation and operation information for the interferometer laser displacement measurement systems parts provided in the Hewlett Packard (HP) Laser Measurement Systems - Hobbyist Specials.

Note: Most references will be to Hewlett Packard (HP) components as they are most common. But some equivalents from Excel or Zygo may appear from time-to-time so be prepared for confusing labeling. ;( ;-)

This guide deals specifically with setting up the laser, interferometer, optical receiver, and their power supplies. Complete information on wiring the chipKit DP32 or SG-µMD1 board to the REF MEAS signals and running the µMD1 Windows GUI may be found in the µMD1 Installation and Operation Manual or µMD2 Installation and Operation Manual. (Note: These and the links below open in a single new tab or window.)

IMPORTANT: If any of the interferometers are from Excel in a kit sold prior to 2024, it will be necessary to confirm that the Polarizing Beam Splitter (PBS) cube (labeled 1011A or 1012A) functions correctly. I have recently come across a small number of Excel PBSs - even new/NOS ones - where the coating on the diagonal is defective even though it looks pristine by eye. At the normal (perpendicular) angle of incidence they are either marginal or totally ineffective at behaving like a PBS.

The simplest way to test the PBS uses the 5517 laser with a linear polarizer (LP, which can be one for a camera but NOT a circular polarizer). Power the laser until READY comes on solid. Remove everything from the interferometer - cube corner(s) and quarter wave plate(s) - and place it in the beam with the label at the top and an edge parallel to the beam. Position the LP in the beam between the laser and PBS with its axis of polarization vertical. If the PBS is good, there will be almost no light coming out the front with most being reflected to one side. (If the axis of polarization for the LP is not labeled, rotate it until almost no light gets through. For a defective PBS, there may be no such orientation even if the incident beam is perfectly perpendicular to the face of the PBS.) Rotate the PBS a few degrees either way around the vertical axis and very little light should still get through. Rotate the PBS 90 degrees around the vertical axis and repeat. The behavior should be similar except that the reflected beam will exit from the opposite face. If either test behaves strangely, contact me for a replacement. I will pay shipping for the replacement and to return the original. Sorry about that. These have been included in the Hobby Special kits for several years but just recently, someone found a defective one. It had never occurred to me to even test these as high quality PBS cubes should not go bad, or be bad from the factory. I'm leaning more toward degradation of the dielectric coating as the cause even though there is no visible evidence of it.

All interferometer PBSs are now routinely tested for this issue, so they should all be acceptable going forward. I have not found any defective genuine HP/Agilent PBSs, but even some of those have a very small acceptance angle. But never fear, the Hobby Special limited unlimited warranty will cover the interferometers for the duration of your research project. Just make sure alignment is PERFECT!

Principles of operation

More information than you probably need or want to know on this technology may be found at:

The following is just a summary.

The technique here is based on what's known as "heterodyne interferometry" which utilizes a two-frequency HeNe laser and special optics to precisely measure changes in distance (called "displacement") down to the nanometer scale. Other types of measurements including those for angle and straightness can be performed with appropriate interferometer optics.

In a nutshell, the two-frequency laser sends out a pair of superimposed beams that differ in optical frequency by a relatively constant amount (called REF), one polarized horizontally and the other polarized vertically. REF is typically in the low MHz range which provides a convenient "carrier" for signal processing. Optics separate the two beams, sending one to a (generally) fixed reflector, and the other to some tool or device whose position needs to be measured precisely. Both beams then return to an optical receiver where another difference frequency (called MEAS) is generated. With no movement, REF and MEAS have the same frequency and the phase relationship between the two beams is constant. But if the tool or whatever moves, the frequency and thus phase relationship between REF and MEAS will change due to doppler shift. With the simplest interferometer optics, a phase change of 360 degrees represents a position change of 1/2 wavelength of the light from the laser, approximately 632.8 nm for the HeNe lasers most often used. The precise wavelength for these lasers is specified to 6 decimal places (e.g., 632.991372 nm for the HP/Agilent 5517B) with a wavelength accuracy of 0.1 ppm over the life of the laser.

Using the two-frequency approach rather than a basic Michelson or similar interferometer, among other things makes these systems more immune to misalignment by eliminating issues of fringe counting and direction, and fringe contrast, and they are less susceptible to changes in signal level as the laser ages, dust settles on the optics, or alignment changes.

The diagrams below show the organization of a single axis system using µMD1 or µMD2 for the processing and measurement display. Both provide capabilities similar to those of an HP-5508A Measurement Display - and a lot more. For 2 or 3 axes, the interferometer optics, remote (Test Arm) reflector, and optical receiver would be replicated, along with 1 or 2 non-polarizing beam-splitters to divide the output of the laser.


By default these systems will come with µMD2. However, while the µMD1 kit is no longer available, the SG-µMD1 PCB and Digikey "Cart" with all the requireed electronic components may be substituted at slightly lower cost..

IMPORTANT: The laser provided with this kit is currently a some version of a 5517. Nearly all are in the smalll rectangular case used by the 5517B/C/D etc, but a few may be in the larger trapazoidal case of the 5517A. Functioanlly they are identical.

Since 5501Bs have been used in the past, info on them is also included here. The differences are as follows:

The photo below shows the typical parts included in a single axis system using a 5517 laser:

For the 5501B version, the connectors and power packs will be different but all other parts are essentially the same.

Styles of some of these parts may vary.

 

Photo of Typical Parts for Single Axis System using 5517 Laser (Left) and 5501B Laser (Right) with Original µMD1
The interferometers shown are the 10702/6A PBS with 10703A CC, 10722A QWP, and generic CC

For a 2-axis system, a non-polarizing beam-splitter is necessary to divide the output of the laser into two approximately equal parts, and a second interferometer and optical receiver are required. For a 3-axis system, an additional set of similar parts is required. The beam-splitters may be 1:1 or 2:1. Either is acceptable. The power won't be equal but the laser should have enough power. The µMD1 and µMD2 boards can handle up to 3 axes.

Note that the laser included with the single axis system may be lower power than with the 2 (or 3) axis system, but should still have enough power for those if desired.

Wiring power and signals to the laser and optical receiver

The wiring can be done first, or after the interferometer optics are mounted. However, even coarse alignment will be a lot simpler if the laser and optical receiver are powered.

Power supplies/wall adapters

CAUTION: ONLY change connections (including plugging or unplugging stuff) with power OFF! Otherwise bad things may happen.

The laser requires +/-15 VDC. Therefore, a pair of power supplies are provided.

There may also be an option to substitute a cased +/-15 VDC switchmode power supply for the power packs. Wiring of that should be self explanatory as all the connections are labeled. The only "gotcha" is that the two outputs may be totally isolated so that the common point will need to be tied together. Take care when wiring this supply, especially the line voltage inputs. Add strain reliefs or tape so that wires can't be ripped out.

Unless you opted for the optional HP cable, it will be necessary to wire up the laser head connector to the DC power packs and REF input to REF header on the µMD1 board. With the optional cable, two sets of wires from the cable are built-in and they just need to be attached to the power supplies and REF/MEAS on the µMD1 board.

One of the circular connectors provided with kit will fit the POWER connector. The other will probably need to be modified to fit the REF connector as the standard connector must have its inner shell rotated by 45 degrees to fit. If the two connectors differ, the one for REF will have pins that are not installed, but they may both be like that. The inner rubber shell that holds the pins needs to be pressed out and rotated 45 degrees. I usually do that by trimming around the edges with a thin blade to free it up and then carefully pushing it out using a rod or the butt-end of a large drill bit on a drill press. Then rotate the shell by 45 degrees in the correct direction and push it back in. After confirming it's in the proper orientation so the labeling is correct, some rubber adhesive can be added to secure it. But that's usually not needed as it will be reasonably tight without it. Alternatively, or until you get up the courage to abuse the connector, inserting pins for REF and REF- will work fine. The GND is not even needed as long as there is a GND running to the chipKit or SG-µMD1 board from the PWR connector(junction of the - on the +15 VDC power pack and + on the -15 VDC power pack).

10780A/B/C optical receiver

The mating connector for these is a strange 4 pin BNC, which is unobtanium for less than 3 arms and 2 legs (if one can find it at all). Therefore, where a mating connector has not been provided, two male pins and a 2 pin female connector has been included that will mate with it. The 2 wire power cable will probably already be plugged into the 10780 and the color of the wires is correct - red for +15 VDC and black for GND/common. But never assume I didn't make a mistake, so double check it! The male pins will need to be soldered to wires for MEAS. Put heatshrink over them once attached to wires to prevent shorts and secure with hot-melt glue if desired.

   BNC Pin   Function
 -----------------------------------------------------------------
  1 (LL,F)    ~MEAS (Zeeman beat signal pair from
  2 (UL,F)     MEAS  differential line driver.)
  3 (LR,M)    Return (also BNC shell and receiver case.)
  4 (UR,M)    +15 VDC

        _____
       |     |
       |     |
       | TP  |
       |     |
       |     |
  MEAS | x o | +15 VDC
 ~MEAS | x o | Return
       |_____|

(Sometimes the connector insert gets rotated slightly. But the "x" denotes a socket while the "o" denotes a pin.)

If there are a pair of wires sticking out of the 10780, red is +15 VDC and black is GND/return. The pins are for MEAS/~MEAS.

If you are fortunate enough to have received a mating connector, or better yet, one with a piece of cable attached, use a DMM to confirm the connections since the color coding varies.

To avoid ground loops, the case of the 10780 should NOT be connected to anything - use insulating "hardware" to secure it to the optical table or whatever. The 10780 originally comes with rectangular black plastic insulators, but these often have a habit of disappearing after awhile. Nylon washers with Nylon screws work just as well.

There may be a gain trim-pot accessible on the top of the 10780 (B version and higher). If response is erratic, it can be adjusted. Usually they can be turned all the way up. If that results in instability, just back off until it quiets down. If the optical receiver is a 10780A, the gain adjustment is internal. Normally, these do not need adjustment. Regardless, it will probably be fine without adjustment. However, if the laser locks (READY on solid) but there is no output (or signal LED) on the 10780, the gain may be set too low. (Though more likely, the alignment needs tweeking.) check the REF signal from the laser either with a scope or the REF readout on µMD1 to confirm that it is actually locking correctly. Around 100-120 µW should be sufficient for the laser to lock; the 10780 requires under 10 µW to produce a valid signal. Also, if you have a 10780F or 10780U with a black or silver fiber connector instead of a lens instead of a 10780A/B/C, it has no lens and no polarizer so there may be no signal unless the laser power were higher and a linear polarizer at 45 degrees was added in front of the optical window. See the notes below.

"TP" is the single pin via a feed-through used to monitor signal level during interferometer alignment. Its output is non-linear, being compressed at the upper end with strong inputs. Monitoring it with a DMM or scope is useful during interferometer alignment.

Notes on the types of optical receivers

In nearly every kit going forward, the optical receiver will be ready to go and nothing needs to be done to it, so the following is for information only. And it matters only if using free-space beams; for use with optical fibers, standard remote fiber receivers will be provided.